Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7504183 | Chromeless phase-shifting mask for equal line/space dense line patterns | Yuan-Hsun Wu, Chia-Tsung Hung | 2009-03-17 |
| 7504184 | Phase-shifting mask for equal line/space dense line patterns | Yuan-Hsun Wu | 2009-03-17 |
| 7052810 | Method of correcting optical proximity effect of contact holes | Tsan Lu, Wen-Bin Wu, Cheng-Kung Lu | 2006-05-30 |
| 6998226 | Method of forming patterned photoresist layer | Yuan-Hsun Wu, Wen-Bin Wu, Ya-Chih Wang | 2006-02-14 |