Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8871103 | Process of planarizing a wafer with a large step height and/or surface area features | Brett W. Busch, Gowri Damarla, Anurag Jindal, Chia-Yen Ho | 2014-10-28 |
| 8580690 | Process of planarizing a wafer with a large step height and/or surface area features | Brett W. Busch, Gowri Damarla, Anurag Jindal, Chia-Yen Ho | 2013-11-12 |
| 5851927 | Method of forming a semiconductor device by DUV resist patterning | Paul Cox, Samuel J. Wright, Judith Sobresky | 1998-12-22 |