Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559486 | Etching mask, process for forming contact holes using same, and semiconductor device made by the process | — | 2003-05-06 |
| 6124213 | Process of fabricating semiconductor device having ashing step for photo-resist mask in plasma produced from N.sub.x H.sub.y gas | Tatsuya Usami, Kouichi Ohto | 2000-09-26 |
| 5810932 | Plasma generating apparatus used for fabrication of semiconductor device | Hideaki Kawamoto, Hidenobu Miyamoto | 1998-09-22 |