Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6001726 | Method for using a conductive tungsten nitride etch stop layer to form conductive interconnects and tungsten nitride contact structure | Rajan Nagabushnam, Rajeev Bajaj, Shyam Mattay, Subramoney Iyer | 1999-12-14 |