Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5963315 | Method and apparatus for processing a semiconductor wafer on a robotic track having access to in situ wafer backside particle detection | William M. Hiatt, Barbara Vasquez | 1999-10-05 |
| 5945354 | Method for reducing particles deposited onto a semiconductor wafer during plasma processing | — | 1999-08-31 |
| 5904800 | Semiconductor wafer processing chamber for reducing particles deposited onto the semiconductor wafer | — | 1999-05-18 |
| 5496438 | Method of removing photo resist | Phil Wootton, Graeme Morland, John Dalziel | 1996-03-05 |
| 5476816 | Process for etching an insulating layer after a metal etching step | Jeffrey G. Cadenhead, Thomas M. Allen, H. Adam Stevens | 1995-12-19 |
| 5250165 | Controlled isotropy reactive ion etcher for multi-stepped sloped contact etch process | Robert K. Berglund, Jonathan C. Dahm | 1993-10-05 |
| 4902377 | Sloped contact etch process | Robert K. Berglund | 1990-02-20 |
| 4698128 | Sloped contact etch process | Robert K. Berglund, Roger Tyldesley | 1987-10-06 |