Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5250165 | Controlled isotropy reactive ion etcher for multi-stepped sloped contact etch process | Karl Mautz, Jonathan C. Dahm | 1993-10-05 |
| 4902377 | Sloped contact etch process | Karl Mautz | 1990-02-20 |
| 4698128 | Sloped contact etch process | Karl Mautz, Roger Tyldesley | 1987-10-06 |