Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903022 | Method of forming contact hole | Yung-Ching Wang, Teng-Chun Yang | 2005-06-07 |
| 6548394 | Method of forming contact plugs | Yung-Ching Wang | 2003-04-15 |
| 6492263 | Dual damascene process which prevents diffusion of metals and improves trench-to-via alignment | Fu-Cheng Lin, Chun-Wei Chen | 2002-12-10 |
| 6245467 | Patterned mask and a deep trench capacitor formed thereby | Jacson Liu | 2001-06-12 |
| 6128070 | Monitor method and apparatus for overlay alignment of a stepper | — | 2000-10-03 |