Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900881 | Step and repeat imprint lithography systems | Sidlgata V. Sreenivasan, Michael Watts, Byung-Jin Choi, Mario Johannes Meissl, Norman E. Schumaker | 2005-05-31 |
| 5781346 | Magnification correction for small field scanning | Paul C. Allen | 1998-07-14 |