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Shouquian Shao

MI Mks Instruments: 1 patents #255 of 442Top 60%
🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%
Overall (All Time): #3,278,301 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7659489 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel William M. Holber, Xing Chen, Andrew Cowe, Matthew Besen, Ronald W. Collins, Jr. +1 more 2010-02-09