Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5989105 | Method and apparatus for polishing chamfers of semiconductor wafers | Akira Kawakawaguchi, Shigeru Kimura, Akihito Yanoo, Masao Takada, Shigeo Kumabe | 1999-11-23 |
| 5449883 | Continuous heat treatment system of semiconductor wafers for eliminating thermal donor | — | 1995-09-12 |
| 4699118 | Apparatus for dressing cutting edge | Hideaki Minami, Yoshinori Ohhata, Shinsuke Sakai | 1987-10-13 |