AK

Akira Kawakawaguchi

MM Mitsubishi Materials: 1 patents #812 of 1,543Top 55%
MS Mitsubishi Materials Silicon: 1 patents #58 of 116Top 50%
📍 Kasai, JP: #3,639 of 5,842 inventorsTop 65%
Overall (All Time): #3,668,452 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5989105 Method and apparatus for polishing chamfers of semiconductor wafers Shigeru Kimura, Akihito Yanoo, Masao Takada, Shoji Tsuruta, Shigeo Kumabe 1999-11-23