Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5989105 | Method and apparatus for polishing chamfers of semiconductor wafers | Akira Kawakawaguchi, Shigeru Kimura, Akihito Yanoo, Masao Takada, Shoji Tsuruta | 1999-11-23 |
| 5976954 | Method and apparatus for cleaning and separating wafers bonded to a fixing member | Shigeru Kimura | 1999-11-02 |
| 5618227 | Apparatus for polishing wafer | Yukio Tsutsumi, Keisuke Takahashi | 1997-04-08 |