Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11389898 | Laser processing apparatus, laser processing method, and method for manufacturing semiconductor apparatus | Keigo Fukunaga | 2022-07-19 |
| 10882141 | Substrate suction stage, substrate treatment apparatus, and substrate treatment method | — | 2021-01-05 |
| 10134598 | Method for manufacturing semiconductor device | Kazunari Nakata, Yoshiaki Terasaki | 2018-11-20 |
| 9659808 | Semiconductor-element manufacturing method and wafer mounting device using a vacuum end-effector | — | 2017-05-23 |
| 8987122 | Method of manufacturing semiconductor device | Kazunari Nakata | 2015-03-24 |
| 8183144 | Method of manufacturing semiconductor device | Tadashi Tsujino | 2012-05-22 |
| 6595428 | Process control device and process control method using a medium with rewritable marking technique | Koji Eguchi, Hiroshi Mochizuki | 2003-07-22 |
| 5679204 | Plasma apparatus | Masayuki Kobayashi, Kiyoshi Maeda, Masato Toyota, Hiroshi Ohnishi, Hiroshi Tanaka +1 more | 1997-10-21 |