Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5399830 | Plasma treatment apparatus | — | 1995-03-21 |
| 5318654 | Apparatus for cleaning a substrate with metastable helium | Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida, Kenji Kawai | 1994-06-07 |
| 5223085 | Plasma etching method with enhanced anisotropic property and apparatus thereof | Kenji Kawai, Moriaki Akazawa, Toshiaki Ogawa, Hiroshi Morita | 1993-06-29 |
| 5147465 | Method of cleaning a surface | Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida, Kenji Kawai | 1992-09-15 |
| 5038013 | Plasma processing apparatus including an electromagnet with a bird cage core | Moriaki Akazawa, Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida | 1991-08-06 |