Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6134008 | Aligner and patterning method using phase shift mask | — | 2000-10-17 |
| 6042977 | Method and apparatus for manufacturing photomask and method of manufacturing a semiconductor device | — | 2000-03-28 |
| 5994001 | Phase shift mask and its manufacturing method and semiconductor device and its manufacturing method using the phase shift mask | — | 1999-11-30 |
| 5964989 | Ionized PVD device and method of manufacturing semiconductor device | — | 1999-10-12 |
| 5962172 | Method and apparatus for manufacturing photomask and method of manufacturing a semiconductor device | — | 1999-10-05 |
| 5958656 | Pattern forming method using phase shift mask | — | 1999-09-28 |
| 5945982 | Data administration apparatus that can search for desired image data using maps | Kimihiko Higashio, Takahiro Fujii, Kagumi Moriwaki, Masako Inoue, Miyuki Ono +8 more | 1999-08-31 |
| 5902702 | Phase shift mask, blank for phase shift mask, and method of manufacturing phase shift mask | Kouichirou Tsujita, Tatsunori Kaneoka | 1999-05-11 |
| 5882827 | Phase shift mask, method of manufacturing phase shift mask and method of forming a pattern using phase shift mask | — | 1999-03-16 |
| 5868849 | Surface processing device | — | 1999-02-09 |
| 5863677 | Aligner and patterning method using phase shift mask | — | 1999-01-26 |
| 5858625 | Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask | — | 1999-01-12 |
| 5853922 | Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask | — | 1998-12-29 |
| 5825668 | Monitoring method and apparatus of surface area of semiconductor wafer | — | 1998-10-20 |
| 5744268 | Phase shift mask, method of manufacturing a phase shift mask and method of forming a pattern with phase shift mask | — | 1998-04-28 |
| 5698348 | Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask | — | 1997-12-16 |
| 5597667 | Photomask and photomask blank | — | 1997-01-28 |
| 5536602 | Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask | — | 1996-07-16 |
| 4987092 | Process for manufacturing stacked semiconductor devices | Kiyoteru Kobayashi, Tadashi Nishimura, Hiroshi Morita, Hidekazu Oda, Yasuo Inoue | 1991-01-22 |
| 4806829 | Apparatus utilizing charged particles | — | 1989-02-21 |