Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6731008 | Semiconductor device with conductive contact layer structure | Kazuo Tomita, Hiroshi Kimura | 2004-05-04 |
| 6686269 | Semiconductor device having improved contact hole structure, and method of manufacturing the same | — | 2004-02-03 |
| 6638777 | Apparatus for and method of etching | — | 2003-10-28 |
| 6346482 | Semiconductor device having an improved contact structure and a manufacturing method thereof | Junko Matsumoto, Akemi Teratani, Yoshihiro Kusumi, Tetsuhiro Fukao, Kazuyuki Ohmi +2 more | 2002-02-12 |
| 6340844 | Semiconductor device having improved contact hole structure, and method of manufacturing the same | — | 2002-01-22 |
| 6232209 | Semiconductor device and manufacturing method thereof | Nobuo Fujiwara, Takahiro Maruyama, Akemi Teratani, Satoshi Ogino, Kazuyuki Ohmi +1 more | 2001-05-15 |
| 6156152 | Plasma processing apparatus | Satoshi Ogino, Kazumasa Yonekura, Hajime Kimura | 2000-12-05 |
| 6156639 | Method for manufacturing contact structure | Tetsuhiro Fukao, Yoshihiro Kusumi, Hiroshi Miyatake, Nobuo Fujiwara, Satoshi Iida | 2000-12-05 |
| 5877081 | Method of manufacturing semiconductor device | Junko Matsumoto | 1999-03-02 |
| 5668052 | Method of manufacturing semiconductor device | Junko Matsumoto | 1997-09-16 |