Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8338247 | Semiconductor device and method of manufacturing same | Tadashi Yamaguchi, Toshiaki Tsutsumi, Kazumasa Yonekura, Kenji Kawai, Yoshihiro Miyagawa +3 more | 2012-12-25 |
| 7928014 | Method for manufacturing a semiconductor device including a silicon film | — | 2011-04-19 |
| 7615281 | Radio wave absorbing coating composition and coated object therewith | Toshifumi Yamamoto, Hiroaki Watanabe, Takashi Takagai | 2009-11-10 |
| 6656849 | Plasma reactor | Takahiro Maruyama | 2003-12-02 |
| 6471821 | Plasma reactor and method | Takahiro Maruyama | 2002-10-29 |
| 6232209 | Semiconductor device and manufacturing method thereof | Nobuo Fujiwara, Takahiro Maruyama, Shigenori Sakamori, Akemi Teratani, Kazuyuki Ohmi +1 more | 2001-05-15 |
| 6156152 | Plasma processing apparatus | Kazumasa Yonekura, Hajime Kimura, Shigenori Sakamori | 2000-12-05 |