Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8618666 | Semiconductor device and method of manufacturing the same | Mika Okumura, Takeshi Murakami | 2013-12-31 |
| 8505381 | Capacitive acceleration sensor | Yasuo Yamaguchi | 2013-08-13 |
| 8304899 | Element wafer and method for manufacturing the same | Mika Okumura, Kimitoshi Satou, Yasuo Yamaguchi | 2012-11-06 |
| 8193631 | Semiconductor device and method of manufacturing the semiconductor device | Kimitoshi Sato, Mika Okumura, Yasuo Yamaguchi | 2012-06-05 |
| 7900515 | Acceleration sensor and fabrication method thereof | Yasuo Yamaguchi, Mika Okumura, Kimitoshi Sato, Takeshi Murakami | 2011-03-08 |
| 7533570 | Electrostatic-capacitance-type acceleration sensor | Yasuo Yamaguchi, Mika Okumura, Kimitoshi Satou | 2009-05-19 |
| 7495301 | Thin film accelerometer | Mika Okumura, Kimitoshi Satou | 2009-02-24 |
| 7371600 | Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same | Kiyoshi Ishibashi, Mika Okumura, Masaaki Aoto, Daisaku Yoshida, Hirofumi Takakura | 2008-05-13 |
| 7094620 | Semiconductor device manufacturing method | Mika Okumura, Kimitoshi Satou | 2006-08-22 |
| 7041593 | Method for manufacturing thin-film structure | Mika Okumura, Kiyoshi Ishibashi | 2006-05-09 |
| 6958529 | Acceleration sensor and method of manufacture thereof | Kiyoshi Ishibashi, Mika Okumura | 2005-10-25 |
| 6905905 | Method of manufacturing thin-film structure | Mika Okumura, Kiyoshi Ishibashi | 2005-06-14 |
| 6900071 | Substrate and method for producing the same, and thin film structure | Mika Okumura, Kiyoshi Ishibashi | 2005-05-31 |
| 6812568 | Electrode structure, and method for manufacturing thin-film structure | Kiyoshi Ishibashi, Mika Okumura | 2004-11-02 |
| 6784011 | Method for manufacturing thin-film structure | Mika Okumura, Kiyoshi Ishibashi, Takefumi Nishigami | 2004-08-31 |