Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371600 | Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same | Kiyoshi Ishibashi, Makio Horikawa, Mika Okumura, Masaaki Aoto, Daisaku Yoshida | 2008-05-13 |