Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242287 | Semiconductor device manufacturing method, press die and guide rail including forming a crack perpendicular to an extension of the sealing resin | Hideji Aoki, Kenichirou Katou, Hiromu Nishitani | 2001-06-05 |
| 5269881 | Plasma processing apparatus and plasma cleaning method | Kenji Shirakawa | 1993-12-14 |
| 5236549 | Process for plasma etching | Kenji Shirakawa | 1993-08-17 |