Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4839523 | Ion implantation apparatus for semiconductor manufacture | Shunroku Taya, Katsunobu Abe | 1989-06-13 |
| 4494005 | Beam scanning control device for ion implantation system | Yukichi Ueno | 1985-01-15 |
| 4399365 | Ion implant chamber for ion implantation system | Takeshi Koike | 1983-08-16 |
| 4383178 | System for driving rotary member in vacuum | Takeshi Koike | 1983-05-10 |