Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7763489 | Method of forming a micromechanical system containing a microfluidic lubricant channel | William Spencer Worley, III | 2010-07-27 |
| 7723144 | Method and system for flip chip packaging of micro-mirror devices | — | 2010-05-25 |
| 7723812 | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems | Fulin Xiong, Spencer Worley | 2010-05-25 |
| 7670880 | Method and structure for forming an integrated spatial light modulator | Xiao Yang, Kegang Huang | 2010-03-02 |
| 7671461 | Method and system for hermetically sealing packages for optics | Xiao Yang | 2010-03-02 |
| 7616370 | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems | Fulin Xiong, Spencer Worley | 2009-11-10 |
| 7580174 | Anti-stiction gas-phase lubricant for micromechanical systems | Fulin Xiong | 2009-08-25 |
| 7522330 | High fill ratio silicon spatial light modulator | Xiao Yang, Yuxiang Wang, Wook Ji, Justin Payne, Ye Wang +2 more | 2009-04-21 |
| 7505195 | Reflective spatial light modulator with high stiffness torsion spring hinge | Tore Nauta | 2009-03-17 |
| 7471439 | Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant | Fulin Xiong | 2008-12-30 |
| 7463404 | Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems | Fulin Xiong | 2008-12-09 |
| 7453624 | Projection display system including a high fill ratio silicon spatial light modulator | Xiao Yang, Yuxiang Wang, Wook Ji, Justin Payne, Ye Wang +2 more | 2008-11-18 |
| 7443568 | Method and system for resonant operation of a reflective spatial light modulator | Tore Nauta | 2008-10-28 |
| 7430359 | Micromechanical system containing a microfluidic lubricant channel | Spencer Worley | 2008-09-30 |
| 7374962 | Method of fabricating reflective spatial light modulator having high contrast ratio | Kegang Huang, Xiao Yang | 2008-05-20 |
| 7372615 | Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant | Fulin Xiong | 2008-05-13 |
| 7344956 | Method and device for wafer scale packaging of optical devices using a scribe and break process | Xiao Yang, Philip H. Chen | 2008-03-18 |
| 7303645 | Method and system for hermetically sealing packages for optics | Xiao Yang | 2007-12-04 |
| 7280263 | Reflective spatial light modulator | Shaoher X. Pan, Xiao Yang, Shoucheng Zhang | 2007-10-09 |
| 7172921 | Method and structure for forming an integrated spatial light modulator | Xiao Yang | 2007-02-06 |
| 7118234 | Reflective spatial light modulator | Shaoher X. Pan, Xiao Yang, Shoucheng Zhang | 2006-10-10 |
| 7092140 | Architecture of a reflective spatial light modulator | Shaoher X. Pan, Xiao Yang, Shoucheng Zhang | 2006-08-15 |
| 7026695 | Method and apparatus to reduce parasitic forces in electro-mechanical systems | Xiao Yang, Shoucheng Zhang, Jie CHEN | 2006-04-11 |
| 7022245 | Fabrication of a reflective spatial light modulator | Shaoher X. Pan, Xiao Yang | 2006-04-04 |