Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9012330 | Method for semiconductor cross pitch doubled patterning process | Lars Heineck | 2015-04-21 |
| 8664077 | Method for forming self-aligned overlay mark | David S. Pratt, Christopher Hawk, Richard T. Housley | 2014-03-04 |