Issued Patents All Time
Showing 126–130 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5643048 | Endpoint regulator and method for regulating a change in wafer thickness in chemical-mechanical planarization of semiconductor wafers | — | 1997-07-01 |
| 5631174 | Method for forming a spacer with a prograde profile | — | 1997-05-20 |
| 5629246 | Method for forming fluorine-doped glass having low concentrations of free fluorine | — | 1997-05-13 |
| 5624868 | Techniques for improving adhesion of silicon dioxide to titanium | — | 1997-04-29 |
| 5382550 | Method of depositing SiO.sub.2 on a semiconductor substrate | — | 1995-01-17 |