Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7056833 | Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor deposition | William Budge, Weimin Li, Gurtej S. Sandhu | 2006-06-06 |
| 7033514 | Method and apparatus for micromachining using a magnetic field and plasma etching | — | 2006-04-25 |
| 6950178 | Method and system for monitoring plasma using optical emission spectroscopy | Kevin Hamer | 2005-09-27 |
| 6936547 | Gas delivery system for deposition processes, and methods of using same | Weimin Li, Li Li, Ross S. Dando, Kevin Hamer, Allen Mardian | 2005-08-30 |
| 6908807 | Methods of forming semiconductor constructions | — | 2005-06-21 |
| 6866900 | Deposition and chamber treatment methods | Weimin Li | 2005-03-15 |
| 6660658 | Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistors | Gurtej S. Sandhu, John T. Moore | 2003-12-09 |
| 6660657 | Methods of incorporating nitrogen into silicon-oxide-containing layers | Gurtej S. Sandhu, John T. Moore | 2003-12-09 |
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Allen Mardian | 2003-09-30 |
| 6606802 | Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gas | Gurtej S. Sandhu, Michael Li | 2003-08-19 |
| 6589611 | Deposition and chamber treatment methods | Weimin Li | 2003-07-08 |