Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7125809 | Method and material for removing etch residue from high aspect ratio contact surfaces | Steve Byrne, Kelly Williamson, Doug Hahn | 2006-10-24 |
| 7022612 | Method of removing etch residues | Max F. Hinerman | 2006-04-04 |
| 6847085 | High aspect ratio contact surfaces having reduced contaminants | Steve Byrne, Kelly Williamson, Doug Hahn | 2005-01-25 |
| 6613681 | Method of removing etch residues | Max F. Hinerman | 2003-09-02 |