Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022577 | Method of forming ultra shallow junctions | — | 2006-04-04 |
| 6767809 | Method of forming ultra shallow junctions | — | 2004-07-27 |
| 5589407 | Method of treating silicon to obtain thin, buried insulating layer | Tatsuo Nakato | 1996-12-31 |
| 5436175 | Shallow SIMOX processing method using molecular ion implantation | Tatsuo Nakato | 1995-07-25 |