Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5861061 | Spin coating bowl | Greg Montanino | 1999-01-19 |
| 5849084 | Spin coating dispense arm assembly | Mark V. Peckham | 1998-12-15 |
| 5769945 | Spin coating bowl exhaust system | Shawn D. Davis, John S. Molebash | 1998-06-23 |