Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800134 | Chemical vapor deposition methods and atomic layer deposition methods | Ross S. Dando, Gurtej S. Sandhu | 2004-10-05 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Ross S. Dando, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6797337 | Method for delivering precursors | Ross S. Dando, Craig M. Carpenter, Garo Derderian, Dan Gealy | 2004-09-28 |
| 6787463 | Chemical vapor deposition methods, and atomic layer deposition method | Gurtej S. Sandhu | 2004-09-07 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Ross S. Dando, Craig M. Carpenter, Philip Campbell, Gurtej S. Sandhu | 2004-09-07 |
| 6743736 | Reactive gaseous deposition precursor feed apparatus | Gurtej S. Sandhu | 2004-06-01 |
| 6627465 | System and method for detecting flow in a mass flow controller | Gurtej S. Sandhu, Sujit Sharan, Neal R. Rueger | 2003-09-30 |
| 6620253 | Engagement mechanism for semiconductor substrate deposition process kit hardware | Ross S. Dando, Craig M. Carpenter, Philip Campbell, Gurtej S. Sandhu | 2003-09-16 |
| 6613587 | Method of replacing at least a portion of a semiconductor substrate deposition chamber liner | Craig M. Carpenter, Ross S. Dando, Philip Campbell, Gurtej S. Sandhu | 2003-09-02 |
| 6468925 | Plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Craig M. Carpenter | 2002-10-22 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Craig M. Carpenter | 2002-07-02 |