Issued Patents All Time
Showing 51–75 of 103 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782900 | Methods and apparatus for cleaning and/or treating a substrate using CO2 | James DeYoung, Michael E. Cole, Steven L. Worm, David Brainard | 2004-08-31 |
| 6763840 | Method and apparatus for cleaning substrates using liquid carbon dioxide | Joseph M. DeSimone, James DeYoung | 2004-07-20 |
| 6747179 | Carbon dioxide-soluble polymers and swellable polymers for carbon dioxide applications | Joseph M. DeSimone, Eva R. Birnbaum, Ruben G. Carbonell, Stephanie Crette, T. Mark McCleskey +3 more | 2004-06-08 |
| 6743078 | Methods, apparatus and slurries for chemical mechanical planarization | Joseph M. DeSimone | 2004-06-01 |
| 6734112 | Divided pressure vessel apparatus for carbon dioxide based systems and methods of using same | Steven L. Worm, James DeYoung, David Brainard | 2004-05-11 |
| 6711773 | Detergent injection methods for carbon dioxide cleaning apparatus | James DeYoung, Timothy J. Romack | 2004-03-30 |
| 6669785 | Methods and compositions for etch cleaning microelectronic substrates in carbon dioxide | James DeYoung, Stephen M. Gross, Mark I. Wagner | 2003-12-30 |
| 6666050 | Apparatus for conserving vapor in a carbon dioxide dry cleaning system | David Brainard, Michael E. Cole, Steve Worm | 2003-12-23 |
| 6641678 | Methods for cleaning microelectronic structures with aqueous carbon dioxide systems | James DeYoung, Stephen M. Gross, Joseph M. DeSimone | 2003-11-04 |
| 6623355 | Methods, apparatus and slurries for chemical mechanical planarization | Joseph M. DeSimone | 2003-09-23 |
| 6613157 | Methods for removing particles from microelectronic structures | James DeYoung, Stephen M. Gross | 2003-09-02 |
| 6602351 | Methods for the control of contaminants following carbon dioxide cleaning of microelectronic structures | James DeYoung, Stephen M. Gross | 2003-08-05 |
| 6596093 | Methods for cleaning microelectronic structures with cyclical phase modulation | James DeYoung, Michael E. Cole, David Brainard | 2003-07-22 |
| 6589592 | Methods of coating articles using a densified coating system | Steve Worm | 2003-07-08 |
| 6562146 | Processes for cleaning and drying microelectronic structures using liquid or supercritical carbon dioxide | James DeYoung, Stephen M. Gross | 2003-05-13 |
| 6536059 | Pumpless carbon dioxide dry cleaning system | Michael E. Cole | 2003-03-25 |
| 6506259 | Carbon dioxide cleaning and separation systems | Timothy J. Romack, Gina M. Stewart, Ramone D. Givens | 2003-01-14 |
| 6499322 | Detergent injection systems for carbon dioxide cleaning apparatus | James DeYoung, Timothy J. Romack | 2002-12-31 |
| 6491730 | Pre-treatment methods and compositions for carbon dioxide dry cleaning | David F. Cauble, James DeYoung, Bernadette Storey-Laubach | 2002-12-10 |
| 6412312 | Cleaning apparatus | Gary Schrebe, Kenneth Grakauskas, Timothy J. Romack | 2002-07-02 |
| 6413574 | Deposition methods utilizing carbon dioxide separation systems | Timothy J. Romack, Gina M. Stewart, Ramone D. Givens | 2002-07-02 |
| 6397421 | Methods and apparatus for conserving vapor and collecting liquid carbon dioxide for carbon dioxide dry cleaning | David Brainard, Michael E. Cole, Steve Worm | 2002-06-04 |
| 6351973 | Internal motor drive liquid carbon dioxide agitation system | Gary Schrebe | 2002-03-05 |
| 6344243 | Surface treatment | Timothy J. Romack, James DeYoung | 2002-02-05 |
| 6332342 | Methods for carbon dioxide dry cleaning with integrated distribution | Timothy J. Romack, James DeYoung, R. Bradley Lienhart, Joseph M. DeSimone, Kenneth L. Huggins | 2001-12-25 |