Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355968 | Silicon shield for package stress sensitive devices | Ming-Da Cheng, Ken Jian Ming Wang, Tian Tian, Mohammad Ayyash, Brian Gregory Rush | 2016-05-31 |
| 6605955 | Temperature controlled wafer chuck system with low thermal resistance | Simon Costello | 2003-08-12 |
| 6583638 | Temperature-controlled semiconductor wafer chuck system | Simon Costello | 2003-06-24 |