Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690215 | Interferometer module | Guido De Boer, Thomas Adrian Ooms, Niels Vergeer | 2017-06-27 |
| 9678443 | Lithography system with differential interferometer module | Guido De Boer, Thomas Adriaan Ooms, Niels Vergeer | 2017-06-13 |
| 9551563 | Multi-axis differential interferometer | Thomas Adriaan Ooms, Niels Vergeer | 2017-01-24 |
| 9395636 | Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer | Guido De Boer, Niels Vergeer, Laurens Plandsoen, Cor Verburg | 2016-07-19 |
| 9383662 | Lithography system for processing at least a part of a target | Niels Vergeer, Guido De Boer, Laurens Plandsoen, Cor Verburg | 2016-07-05 |
| 9261800 | Alignment of an interferometer module for use in an exposure tool | Guido De Boer, Thomas Adriaan Ooms, Niels Vergeer | 2016-02-16 |
| 9201315 | Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system | Guido De Boer, Niels Vergeer, Laurens Plandsoen, Cor Verburg | 2015-12-01 |
| 9069265 | Interferometer module | Guido De Boer, Thomas Adrian Ooms, Niels Vergeer | 2015-06-30 |