Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678443 | Lithography system with differential interferometer module | Guido De Boer, Niels Vergeer, Godefridus Cornelius Antonius Couweleers | 2017-06-13 |
| 9551563 | Multi-axis differential interferometer | Godefridus Cornelius Antonius Couweleers, Niels Vergeer | 2017-01-24 |
| 9261800 | Alignment of an interferometer module for use in an exposure tool | Guido De Boer, Niels Vergeer, Godefridus Cornelius Antonius Couweleers | 2016-02-16 |