Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9434045 | Planarization device and planarization method using the same | Liang-Yu Hu, Tang-Tsai Chang, Ming-Tsan Lai | 2016-09-06 |
| 9079287 | CMP polishing pad detector and system | Ming-Tsan Lai | 2015-07-14 |
| 6386213 | Plate-tilting apparatus | Sheng-Feng Hung, Hua-Jen Tseng, Chun-Chieh Lee | 2002-05-14 |