Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9434045 | Planarization device and planarization method using the same | Yu-Hua Yeh, Liang-Yu Hu, Tang-Tsai Chang | 2016-09-06 |
| 9079287 | CMP polishing pad detector and system | Yu-Hua Yeh | 2015-07-14 |