Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9434045 | Planarization device and planarization method using the same | Yu-Hua Yeh, Tang-Tsai Chang, Ming-Tsan Lai | 2016-09-06 |
| 8602838 | Chemical mechanical polishing method and system | Meng-Yi Shen, Tsung-Hsuan Ho, Sheng-I Tseng | 2013-12-10 |