Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7968859 | Wafer edge defect inspection using captured image analysis | John A. Knoch, Jason McNichols | 2011-06-28 |
| 7183181 | Dynamic edge bead removal | Xiao Li, Bruce Whitefield | 2007-02-27 |
| 6767692 | Process for inhibiting edge peeling of coating on semiconductor substrate during formation of integrated circuit structure thereon | Ann I. Kang, Bruce Whitefield | 2004-07-27 |
| 6614507 | Apparatus for removing photoresist edge beads from thin film substrates | Bruce Whitefield | 2003-09-02 |
| 6495312 | Method and apparatus for removing photoresist edge beads from thin film substrates | Bruce Whitefield | 2002-12-17 |