Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082524 | Mask patterns for use in multiple-exposure lithography | Robert P. Gleason, Timothy Lin, Andrew Moore, Bennett W. Olson | 2011-12-20 |
| 7793253 | Mask-patterns including intentional breaks | Daniel Abrams, Danping Peng, Yong Liu | 2010-09-07 |
| 6986972 | Alternating aperture phase-shift mask fabrication method | — | 2006-01-17 |
| 6747358 | Self-aligned alloy capping layers for copper interconnect structures | Richard Schinella, Sheldon Aronowitz, Vladimir Zubkov | 2004-06-08 |
| 6566262 | Method for creating self-aligned alloy capping layers for copper interconnect structures | Richard Schinella, Sheldon Aronowitz, Vladimir Zubkov | 2003-05-20 |
| 6552743 | Digital camera-ready printer | — | 2003-04-22 |
| 5661043 | Forming a buried insulator layer using plasma source ion implantation | James B. Kruger, J. Leon Shohet | 1997-08-26 |
| 4463265 | Electron beam proximity effect correction by reverse field pattern exposure | Geraint Owen | 1984-07-31 |