Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5336640 | Method of manufacturing a semiconductor device having an insulating layer composed of a BPSG film and a plasma-CVD silicon nitride film | — | 1994-08-09 |
| 5296037 | Plasma CVD system comprising plural upper electrodes | Kojiro Sugane | 1994-03-22 |
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Kyoji Tokunaga, Tomoharu Katagiri, Tsuyoshi Hashimoto, Tomohiro Ohta | 1994-03-01 |
| 5090515 | Passenger transport installation, vehicle for use therein, and method of operating said installation | Tastuhiko Takahashi, Jun Sugahara, Toshihiko Nara, Yuki YAMAMOTO, Yoshinari Atsumi +7 more | 1992-02-25 |