Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5296037 | Plasma CVD system comprising plural upper electrodes | Nobuyoshi Sato | 1994-03-22 |
| 5169478 | Apparatus for manufacturing semiconductor devices | Hidekazu Miyamoto, Noritsugu Yamada | 1992-12-08 |