Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828258 | Method of forming an insulating film having SI-C, SI-O and SI-H bonds to cover wiringlines of a semiconductor device | Tadashi Nakano | 2004-12-07 |
| 6423651 | Insulating film of semiconductor device and coating solution for forming insulating film and method of manufacturing insulating film | Tadashi Nakano | 2002-07-23 |
| 5290736 | Method of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmospheric | Nobuyoshi Sato, Tomoharu Katagiri, Tsuyoshi Hashimoto, Tomohiro Ohta | 1994-03-01 |