Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7406675 | Method and system for improving aerial image simulation speeds | Sergey V. Uzhakov, Stanislav V. Aleshin | 2008-07-29 |
| 7401318 | Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes | Stanislav V. Aleshin, Sergei Rodin, Eugeni E. Egorov | 2008-07-15 |
| 7340706 | Method and system for analyzing the quality of an OPC mask | Ilya Golubtsov, Stanislav V. Aleshin, Ranko Scepanovic, Sergei Rodin, Sergey V. Uzhakov +2 more | 2008-03-04 |
| 7260814 | OPC edge correction based on a smoothed mask design | Sergei Rodin, Stanislav V. Aleshin | 2007-08-21 |
| 7039896 | Gradient method of mask edge correction | Stanislav V. Aleshin, Eugeni E. Egorov, Sergei Rodin | 2006-05-02 |
| 7035446 | Quality measurement of an aerial image | Jaroslav Kalinin, Stanislav V. Aleshin, Nadya Strelkova | 2006-04-25 |
| 6988260 | Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes | Stanislav V. Aleshin, Sergei Rodin, Eugeni E. Egorov | 2006-01-17 |
| 6934410 | Mask correction for photolithographic processes | Stanislav V. Aleshin, Eugeni E. Egorov, Gennady V. Belokopytov, Paul G. Filseth | 2005-08-23 |
| 6911285 | Sidelobe correction for attenuated phase shift masks | Stanislav V. Aleshin, Sergei Rodin | 2005-06-28 |
| 6854104 | First approximation for OPC significant speed-up | Stanislav V. Aleshin, Jaroslav Kalinin, Sergel Rodin | 2005-02-08 |
| 6813758 | Optical proximity correction driven hierarchy | Stanislav V. Aleshin, Evgueny E. Egorov | 2004-11-02 |