Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7493577 | Automatic recognition of geometric points in a target IC design for OPC mask quality calculation | Stanislav V. Aleshin, Ilya Golubtsov | 2009-02-17 |
| 7401318 | Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes | Stanislav V. Aleshin, Marina Medvedeva, Eugeni E. Egorov | 2008-07-15 |
| 7340706 | Method and system for analyzing the quality of an OPC mask | Ilya Golubtsov, Stanislav V. Aleshin, Ranko Scepanovic, Marina Medvedeva, Sergey V. Uzhakov +2 more | 2008-03-04 |
| 7260814 | OPC edge correction based on a smoothed mask design | Stanislav V. Aleshin, Marina Medvedeva | 2007-08-21 |
| 7039896 | Gradient method of mask edge correction | Marina Medvedeva, Stanislav V. Aleshin, Eugeni E. Egorov | 2006-05-02 |
| 6988260 | Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes | Stanislav V. Aleshin, Marina Medvedeva, Eugeni E. Egorov | 2006-01-17 |
| 6911285 | Sidelobe correction for attenuated phase shift masks | Stanislav V. Aleshin, Marina Medvedeva | 2005-06-28 |
| 6785871 | Automatic recognition of an optically periodic structure in an integrated circuit design | Evgueny E. Egorov, Stanislav V. Aleshin | 2004-08-31 |