Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6258205 | Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material | Gayle W. Miller, Gail D. Shelton | 2001-07-10 |
| 6080670 | Method of detecting a polishing endpoint layer of a semiconductor wafer which includes a non-reactive reporting specie | Gayle W. Miller, Gail D. Shelton | 2000-06-27 |
| 6071818 | Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material | Gayle W. Miller, Gail D. Shelton | 2000-06-06 |