Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871002 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2011-01-18 |
| 7871004 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2011-01-18 |
| 7337552 | Method and apparatus for registration with integral alignment optics | Adlai H. Smith, Robert O. Hunter, Jr., Thomas K. Khuu, Yuji Yamaguchi | 2008-03-04 |
| 7271905 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2007-09-18 |
| 7268360 | Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion | Adlai H. Smith, Robert O. Hunter, Jr. | 2007-09-11 |
| 7160657 | Reference wafer and process for manufacturing same | Adlai H. Smith, Robert O. Hunter, Jr. | 2007-01-09 |
| 7136144 | Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion | Adlai H. Smith, Robert O. Hunter, Jr. | 2006-11-14 |
| 7099011 | Method and apparatus for self-referenced projection lens distortion mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2006-08-29 |
| 7088427 | Apparatus and method for high resolution in-situ illumination source measurement in projection imaging systems | Adlai H. Smith, Robert O. Hunter, Jr. | 2006-08-08 |
| 6899982 | Method and apparatus for proper ordering of registration data | Adlai H. Smith | 2005-05-31 |
| 6833221 | Method and apparatus for proper ordering of registration data | Adlai H. Smith | 2004-12-21 |
| 6741338 | In-situ source metrology instrument and method of use | Adlai H. Smith | 2004-05-25 |
| 6734971 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2004-05-11 |
| 6699627 | Reference wafer and process for manufacturing same | Adlai H. Smith, Robert O. Hunter, Jr. | 2004-03-02 |
| 6573986 | Method and apparatus for self-referenced projection lens distortion mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2003-06-03 |
| 6356345 | In-situ source metrology instrument and method of use | Adlai H. Smith | 2002-03-12 |
| 6208439 | Generalized geometric transforms for computer generated holograms | Adlai H. Smith | 2001-03-27 |
| 6130009 | Apparatus and process for nozzle production utilizing computer generated holograms | Adlai H. Smith, Robert O. Hunter, Jr. | 2000-10-10 |
| 5978085 | Apparatus method of measurement and method of data analysis for correction of optical system | Adlai H. Smith, Robert O. Hunter, Jr. | 1999-11-02 |
| 5929991 | Single plate corrector for stepper lens train | Adlai H. Smith | 1999-07-27 |
| 5828455 | Apparatus, method of measurement, and method of data analysis for correction of optical system | Adlai H. Smith, Robert O. Hunter, Jr. | 1998-10-27 |
| 5702662 | Process for ablating high density vias in flexible substrate | Adlai H. Smith, Robert O. Hunter, Jr., Steven Blair, Jim Wilkinson | 1997-12-30 |
| 5660738 | Direct etch processes for the manufacture of high density modules | Robert O. Hunter, Jr., Adlai H. Smith | 1997-08-26 |
| 5640233 | Plate correction technique for imaging systems | Robert O. Hunter, Jr., Adlai H. Smith | 1997-06-17 |
| 5633735 | Use of fresnel zone plates for material processing | Robert O. Hunter, Jr., Adlai H. Smith, Clark C. Guest | 1997-05-27 |