Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5699185 | Use of fresnel zone plates for material processing | Robert O. Hunter, Jr., Adlai H. Smith, Clark C. Guest | 1997-12-16 |
| 5362940 | Use of Fresnel zone plates for material processing | Robert O. Hunter, Jr., Adlai H. Smith, Clark C. Guest | 1994-11-08 |
| 5202748 | In situ process control system for steppers | Robert O. Hunter, Jr., Adlai H. Smith | 1993-04-13 |
| 5142132 | Adaptive optic wafer stepper illumination system | Robert O. Hunter, Jr., Adlai H. Smith | 1992-08-25 |
| 5136413 | Imaging and illumination system with aspherization and aberration correction by phase steps | Robert O. Hunter, Jr., Adlai H. Smith | 1992-08-04 |
| 5094536 | Deformable wafer chuck | Robert O. Hunter, Jr., Adlai H. Smith | 1992-03-10 |