Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566320 | NiW(X) sputtering target with improved structure | Markus Schultheis | 2023-01-31 |
| 11125708 | Silver alloy-based sputter target | Christoph Simons, Albert Kastner, Jens Wagner, Uwe Konietzka | 2021-09-21 |
| 10487392 | Double-layer system comprising a partially absorbing layer, and method and sputter target for producing said layer | Albert Kastner, Markus Schultheis, Jens Wagner | 2019-11-26 |
| 9960022 | Sputtering target with optimized performance characteristics | Carl Christoph Stahr | 2018-05-01 |
| 9334564 | Tube-shaped sputtering target | Christoph Simons, Josef Heindel, Christoph Stahr | 2016-05-10 |
| 9051646 | Sputtering target having amorphous and microcrystalline portions and method of producing same | Andreas Herzog, Sabine Schneider-Betz, Christoph Stahr | 2015-06-09 |
| 8974707 | Planar or tubular sputtering target and method for the production thereof | Sabine Schneider-Betz, Uwe Konietzka, Markus Schultheis, Ben KAHLE, Lars Ebel | 2015-03-10 |
| 8581248 | Thin film transistor (TFT) having copper electrodes | Sabine Schneider-Betz | 2013-11-12 |
| 6372104 | Cobalt base alloy sputtering target with high magnetic field penetration | Josef Heindel | 2002-04-16 |
| 6187253 | Method of preparing indium oxide/tin oxide target for cathodic sputtering | Wolfgang Dauth, Martin Kutzner, Bruce Gehman, Shawn Vahlstrom | 2001-02-13 |
| 5728279 | Cobalt base alloy target for a magnetron cathode sputtering system | Martin Weigert, Kwei Teng, Bruce Gehman | 1998-03-17 |
| 5660599 | Process for the recycling of spent indium oxide-tin oxide sputtering targets | Wolfgang Dauth, Martin Kutzner | 1997-08-26 |
| 5531948 | Process for the production of partially reduced indium oxide-tin oxide targets | Martin Kutzner, Martin Weigert, Wolfgang Dauth, Bruce Gehman | 1996-07-02 |
| 5480532 | Sputter target for cathodic atomization to produce transparent, conductive layers | Martin Kutzner, Martin Weigert, Uwe Konietzka, Bruce Gehman, Shawn Vahlstrom | 1996-01-02 |