Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8974707 | Planar or tubular sputtering target and method for the production thereof | Martin Schlott, Sabine Schneider-Betz, Uwe Konietzka, Markus Schultheis, Lars Ebel | 2015-03-10 |