Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9051646 | Sputtering target having amorphous and microcrystalline portions and method of producing same | Andreas Herzog, Martin Schlott, Christoph Stahr | 2015-06-09 |
| 8974707 | Planar or tubular sputtering target and method for the production thereof | Martin Schlott, Uwe Konietzka, Markus Schultheis, Ben KAHLE, Lars Ebel | 2015-03-10 |
| 8581248 | Thin film transistor (TFT) having copper electrodes | Martin Schlott | 2013-11-12 |