Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8388219 | Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting wafer | Joerg-Thomas Zettler, Tobias Schenk, Steffen Uredat, Jens Zilian, Bernd Henninger +1 more | 2013-03-05 |